Gold Nanoparticles Generated by Electron Beam Lithography of Gold(I)−Thiolate Thin Films

Abstract

Patterned arrays of gold nanoparticles in two dimensions were prepared by the electron beam reduction and subsequent thermolysis of gold(I)−thiolate complexes on silicon surfaces. The array line widths are <50 nm and they are composed of small gold nanoparticles (average diameters from 2 to 4.5 nm). Variation in the electron beam dose allows for the variation of the interparticle distances in a given sample.