Properties of TiSiN coatings deposited by hybrid HiPIMS and pulsed-DC magnetron co-sputtering

Mohammad Arab Pour Yazdi, Fernando Lomello, Junling Wang, Frédéric Sanchette, Zhili Dong, Timothy J. White, Y. Wouters, Frédéric Schuster, Alain Billard

Vacuum · 2014 · 62 citations · 39 references

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