Journal of Electrostatics · 2011 · 51 citations · 16 references
EngineeringComputational EngineeringElectrical EngineeringComputational ElectromagneticsElectromagneticsSensorsCapacitive SensingElectrical SensorsElectrostatic ActuationForce SensingForce SensorsMems SensorsArray-based SensingElectrical SensingElectrostatic CharacterizationElectrostatic Field CalculationsElectrostatic Force ModelingElectrostatic SensingSensor Arrays
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