Advanced Materials · 2001 · 87 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceOptical MaterialsOpticsPhotonicsIntegrated PhotonicsOptical WaveguidesPhotonic CrystalsPhotonic Integrated CircuitsPhotonic MaterialsSilicon PhotonicsFocused Ion Beam LithographyFocused Ion Beam MachiningInterference LithographyOptical LithographyPhotonic Crystal SlabsPhotonic Crystal WaveguidesWaveguide FabricationWaveguiding
Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4–air photonic crystal with a light-guiding defect line running along the center of the slab (total length = 1 mm).