Large Area Photonic Crystal Slabs for Visible Light with Waveguiding Defect Structures: Fabrication with Focused Ion Beam Assisted Laser Interference Lithography

Abstract

Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4–air photonic crystal with a light-guiding defect line running along the center of the slab (total length = 1 mm).