Deposition and properties of germanium-carbon alloy films produced from tetraethylgermanium in an r.f. discharge

M. Gazicki‐Lipman, K. Pirker, R. Schallauer, W. Fallmann, F. Olcaytug, G. Urban, A. Jachimowicz, F. Köhl

Thin Solid Films · 1990 · 28 citations · 6 references

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