Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 27 citations · 0 references
Natural SciencesBiomedical EngineeringPhysicsBiomedical ImagingDiagnostic ImagingOpticsInfrared SpectroscopyLight MicroscopyNear-infrared ImagingOptical DiagnosticsOptical ImagingSuper-resolution MicroscopyLateral ResolutionNear-field Optical MicroscopyNear-field OpticsNear-field ScanningNear-field Scanning Optical MicroscopySubwavelength ImagingSuper-resolutionSuper-resolution Imaging
A brief survey of the principles of near-field optical imaging will be presented. Selected examples of super resolution imaging using visible reflected light will demonstrate that lateral resolution far smaller than the illumination wavelength can be achieved and that the technique is surface sensitive. In addition, we will demonstrate that subwavelength resolution can be achieved in the near-infrared spectral regime and that near-field scanning optical microscopy (NSOM) can be used in diagnostic inspection of hetrojunction laser modal emission patterns.