Effect of bias enhanced nucleation on the nucleation density of diamond in microwave plasma CVD

Diamond synthesis from gas phase in microwave plasma

Mutsukazu Kamo, Yoichiro Sato, Seiichiro Matsumoto et al. · Journal of Crystal Growth · 1983 · 964 citations

Natural Sciences, Materials Science, Physics +11

Generation of diamond nuclei by electric field in plasma chemical vapor deposition

Shigemi Yugo, Tomonori Kanai, T. Kimura et al. · Applied Physics Letters · 1991 · 587 citations

Natural Sciences, Materials Engineering, Materials Science +9

Characterization of bias-enhanced nucleation of diamond on silicon by<i>invacuo</i>surface analysis and transmission electron microscopy

Brian R. Stoner, M. G.-H., Scott D. Wolter et al. · Physical review. B, Condensed matter · 1992 · 487 citations

Natural Sciences, Materials Engineering, Materials Science +17

Epitaxial diamond thin films on (001) silicon substrates

Xin Jiang, C.‐P. Klages, R. Zachai et al. · Applied Physics Letters · 1993 · 301 citations

Natural Sciences, Materials Engineering, Materials Science +17

Heteroepitaxial diamond growth on (100) silicon

Xin Jiang, C.‐P. Klages · Diamond and Related Materials · 1993 · 215 citations

Engineering, Materials Engineering, Materials Science +12