Journal of Physics D Applied Physics · 1968 · 34 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ChemistrySurface ScienceEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor InterfacesSemiconductor SurfacesSemiconductor Thin FilmsSilicon MaterialsEpitaxial Film GrowthSemiconductor Surface PreparationSiliconSilicon Crystal GrowthSilicon EpitaxySingle-crystal SiliconSurface GrowthZinc Sulfides
Epitaxial layers, up to 5 μm thick, of zinc sulphide have been grown on thermally cleaned (111) surfaces of single-crystal silicon disks. The layers have been shown by x-ray and electron diffraction to be single-crystal and a continuation of the silicon lattice. The importance of producing a clean silicon surface and of maintaining constant temperatures during the deposition has been demonstrated.
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