Concepedia

Titanium nitrade film formation by the dynamic ion beam mixing method

Y. Nakagawa, S. Ohtani, Takao Nakata, M. Mikoda, Toshiyuki Takagi

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 10 citations · 4 references

DOI

Concepts

References

4

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

, , +16

Heavy-ion sputtering yield of silicon

H. H. Andersen, H.L. Bay · Journal of Applied Physics · 1975 · 78 citations

, , +13

Titanium Nitride Crystal Growth with Preferred Orientation by Dynamic Mixing Method

Masato Kiuchi, Masato Tomita, Kanenaga Fujii et al. · Japanese Journal of Applied Physics · 1987 · 43 citations

, , +17

Surface modification of structural materials by dynamic ion mixing process

S. Nakashima, Masatake Fukushima, Mitsuo HAGINOYA et al. · Materials Science and Engineering A · 1989 · 16 citations

, , +16