Journal of Crystal Growth · 1987 · 11 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsSemiconductor DevicesSemiconductor MaterialsResidual StressSemiconductor Crystal GrowthSilicon MaterialsStrain HardeningThermal Properties Of MaterialsThermal StressesSilicon Crystal GrowthSilicon Wafer GrowthTemperature Dependence Of DeformationThermal StrainThermomechanical Stress
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