Fast deposition of diamond-like hydrogenated carbon films

Diamond-like amorphous carbon

John Robertson · Materials Science and Engineering R Reports · 2002 · 6K citations

Materials Science, Diamond-like Carbon, Engineering +4

Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids

M. P. Seah, W. A. Dench · Surface and Interface Analysis · 1979 · 5.2K citations

Quantitative Electron Spectroscopy, Engineering, Electron Diffraction +19

Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon

David R. McKenzie, David A. Muller, Bernard Pailthorpe · Physical Review Letters · 1991 · 951 citations

Materials Science, Filtered Vacuum Arc, Compressive Stress +13

Direct evaluation of the sp3 content in diamond-like-carbon films by XPS

Philippe Mérel, M. Tabbal, Mohamed Chaker et al. · Applied Surface Science · 1998 · 677 citations

Materials Science, Materials Engineering, Chemical Engineering +10

Subplantation model for film growth from hyperthermal species

Y. Lifshitz, S. R. Kasi, J. W. Rabalais et al. · Physical review. B, Condensed matter · 1990 · 590 citations

Engineering, Preferred Orientation, Subplantation Model +18