Japanese Journal of Applied Physics · 1995 · 31 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceElemental AnalysisMaterials ChemistryThin FilmsElectron MicroscopyPhase SeparationThin-film DepositionTransmission Electron MicroscopyCompositional MappingElemental Distribution MappingElemental ImagingElemental MappingGrain BoundariesTransmission Electron Microscopy Of GrainsTransmission Electron Microscopy Phase AnalysisTransmission Electron Microscopy Phase Mapping
The elemental mapping of a CoCrTa thin film deposited at 270° C has been performed using a transmission electron microscope equipped with an imaging filter. A compositional separation, which consists of Co-enriched areas and a Cr-enriched phase around them, is quantitatively observed. The Co-enriched areas are about 20 nm in diameter and the Cr-enriched phase extends with a two-dimensional network, which corresponds to grain boundaries. Intragrain Cr-enriched areas, which are less enriched than at the grain boundaries, are also observed.
6