Analysis of thin metallic films by glow discharge mass spectrometry

Positive-ion bombardment of substrates in rf diode glow discharge sputtering

J. W. Coburn, E. Kay · Journal of Applied Physics · 1972 · 421 citations

Positive-ion Bombardment, Electrical Engineering, Ion Implantation +14

Ion Energies at the Cathode of a Glow Discharge

William D. Davis, T. A. Vanderslice · Physical Review · 1963 · 378 citations

Electrical Engineering, Conventional Magnetic Analyzer, Engineering +11

PLASMA DIAGNOSTICS OF AN rf-SPUTTERING GLOW DISCHARGE

J. W. Coburn, E. Kay · Applied Physics Letters · 1971 · 154 citations

Electrical Engineering, Engineering, Physics +15

Glow-discharge mass spectrometry—Technique for determining elemental composition profiles in solids

J. W. Coburn, E. Taglauer, E. Kay · Journal of Applied Physics · 1974 · 103 citations

Engineering, Glow Discharge, Chemistry +16

State selected ion–molecule reactions by a TESICO technique. II. Separation of the reactant spin–orbit states in the reaction Ar+(2<i>P</i>3/2, 2<i>P</i>1/2)+H2(D2)→ArH+(ArD+)+H(D)

Kenichiro Tanaka, J. Durup, Tatsuhisa Kato et al. · The Journal of Chemical Physics · 1981 · 87 citations

Collision Energy Range, Engineering, Nuclear Physics +19