Publication | Closed Access
Milling micro-structures using focused ion beams and its application to photonic components
25
Citations
7
References
2006
Year
Optical MaterialsEngineeringMicroscopyPhotonic ComponentsMechanical EngineeringFocused Ion BeamsMicro-optical ComponentBeam OpticIon ImplantationOptical PropertiesOptical Fibre TipIon BeamPhotonic ElementsMaterials SciencePhotonicsPhysicsMicrostructureCorresponding Optical CharacterizationsMicrofabricationApplied PhysicsOptoelectronics
Investigations in micro-structuring optical fibre tips with direct focused ion beam writing will be discussed. The first part considers fundamental aspects and shows relevant experiments to understand and control ion patterning. The second part exemplifies structuring of photonic elements by the fabrication of apertures on an optical fibre tip and the corresponding optical characterizations.
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