Concepedia

Sputtering by cluster ions

Y. Yamamura

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 72 citations · 13 references

DOI

Concepts

References

13

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Dynamics of Radiation Damage

John B. Gibson, A.N. Goland, Michael Milgram et al. · Physical Review · 1960 · 1.3K citations

, , +15

Two-Particle Collisions. I. General Relations for Collisions in the Laboratory System

M. Gryziṅski · Physical Review · 1965 · 589 citations

, , +16

Role of ions in ion-based film formation

Toshiyuki Takagi · Thin Solid Films · 1982 · 190 citations

, , +12

Theory of sputtering and comparison to experimental data

Y. Yamamura · Nuclear Instruments and Methods in Physics Research · 1982 · 118 citations

, , +3