XPS imaging of depth profiles and amount of substance based on Tougaard’s algorithm

Smoothing and Differentiation of Data by Simplified Least Squares Procedures.

Abraham Savitzky, Marcel J. E. Golay · Analytical Chemistry · 1964 · 21.3K citations

Natural Sciences, Chemistry, Analytical Chemistry +6

Calculations of electron inelastic mean free paths. V. Data for 14 organic compounds over the 50–2000 eV range

Shigeo Tanuma, C. J. Powell, David R. Penn · Surface and Interface Analysis · 1994 · 2.7K citations

Natural Sciences, Chemistry, Physics +13

Universality Classes of Inelastic Electron Scattering Cross-sections

S. Tougaard · Surface and Interface Analysis · 1997 · 311 citations

Natural Sciences, Materials Science, Physics +16

Accuracy of the non-destructive surface nanostructure quantification technique based on analysis of the XPS or AES peak shape

S. Tougaard · Surface and Interface Analysis · 1998 · 261 citations

Natural Sciences, Materials Science, Physics +17

Surface nanostructure determination by x-ray photoemission spectroscopy peak shape analysis

S. Tougaard · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 202 citations

Natural Sciences, Materials Engineering, Materials Science +15