Aluminium atom density and temperature in a dc magnetron discharge determined by means of blue diode laser absorption spectroscopy

Abstract

Diode laser absorption studies of aluminium atoms produced in a direct current (dc) magnetron discharge with argon as well as argon/nitrogen and argon/oxygen mixtures as working gas are reported. The measured Al atom density increases with increasing discharge power. The observed temperature being in the range of 340–420 K rises with increasing power but shows little pressure dependence. A small admixture of oxygen gas leads to a complete disappearance of the absorption signal, a result which is not yet fully understood.