Publication | Closed Access
How to fabricate a defect free Si(001) surface
99
Citations
26
References
2000
Year
Materials ScienceMaterials EngineeringElectrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationSurface ScienceApplied PhysicsSiliceneSurface EngineeringDefect Free SiSemiconductor Device FabricationDefect DensityElectronic PackagingSilicon On InsulatorMicroelectronicsSurface ProcessingDefect Densities
We demonstrate the successful fabrication of an almost defect free Si(001) surface by refining the standard annealing and flashing surface preparation method. On any desired samples, we can routinely fabricate a surface with defect densities lower than 0.1%, significantly reducing the defect density compared to surfaces fabricated by standard methodology.
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