Structural characteristics and mechanical properties of aluminium oxide thin films prepared by off-plane filtered cathodic vacuum arc system

Control of the structure and properties of aluminum oxide coatings deposited by pulsed magnetron sputtering

Peter Kelly, R.D. Arnell · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 103 citations

Engineering, Thin Film Process Technology, Chemical Deposition +20

Reactive direct current magnetron sputtering of aluminum oxide coatings

W.D. Sproul, Michael E. Graham, Ming‐Show Wong et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 101 citations

Materials Science, Materials Engineering, Thermal Spray Coating +12

Optical and electrical properties of aluminum oxide films deposited by spray pyrolysis

M. Aguilar‐Frutis, Mario E. Rodríguez‐García, C. Falcony · Applied Physics Letters · 1998 · 100 citations

Materials Science, Water Mist, Optical Materials +14

THE DOUBLE BEND FILTERED CATHODIC ARC TECHNOLOGY AND ITS APPLICATIONS

X. Shi, Beng Kang Tay, Shu Ping Lau · International Journal of Modern Physics B · 2000 · 81 citations

Materials Science, Electrical Engineering, Chemical Engineering +11

Deposition and modification of titanium nitride by ion assisted arc deposition

Avi Bendavid, Peter Martin, X. Wang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 68 citations

Engineering, Thin Film Process Technology, Chemical Deposition +19