Vacuum · 1995 · 17 citations · 5 references
EngineeringElectrical EngineeringInstrumentationMetrologyFlow MeasurementFlow MetrologyFlow SensorsGas SensorsMeasurement SystemsFlow Measurement DevicesGas Flow MetrologyGas Metering
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A precision gas flowmeter for vacuum metrology
Karl Jousten, G. Messer, D Wandrey · Vacuum · 1993 · 46 citations
Primary pressure measurements down to 10−6 Pa
Mercede Bergoglio, Anita Calcatelli, L Marzola et al. · Vacuum · 1988 · 34 citations