Vacuum · 1993 · 46 citations · 5 references
EngineeringPhysicsInstrumentationMetrologyCalibrationFlow MeasurementFlow MetrologyFlow SensorsGas SensorsMeasurement StandardsFlow Velocity MeasurementsGas Flow MetrologyGas Flow SensorsGas MeteringVacuum Technology
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The measurement of gas throughput in range 10−4 to 10−10 pa m3 s−1
G.N. Peggs · Vacuum · 1976 · 33 citations
Experiences with cryopumps in calibration devices