Generation kinetics of oxide charges and surface states during oxidation of silicon

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

The Si-SiO₂Interface - Electrical Properties as Determined by the Metal-Insulator-Silicon Conductance Technique

E. H. Nicollian, A. Goetzberger · Bell System Technical Journal · 1967 · 1.8K citations

Engineering, Electrical Engineering, Materials Science +17

Characteristics of the Surface-State Charge (Qss) of Thermally Oxidized Silicon

B. E. Deal, Michael C. Sklar, Andrew S. Grove et al. · Journal of The Electrochemical Society · 1967 · 708 citations

Engineering, Materials Engineering, Materials Science +17

The Current Understanding of Charges in the Thermally Oxidized Silicon Structure

Bruce E. Deal · Journal of The Electrochemical Society · 1974 · 360 citations · Full text

Engineering, Materials Science, Physics +17

The physics of SiO2 and its interfaces

W. Beall Fowler · Journal of Colloid and Interface Science · 1980 · 238 citations

Natural Sciences, Materials Science, Physics +10