Ceramic Parts Patterned in the Micrometer Range

Abstract

Micropatterning of ceramics (with feature sizes down to 2 μm in the horizontal and vertical directions) by means of soft, elastomeric molds in order to produce crack-free samples is reported. Particular attention is paid to the influence of the initial powder particle size. The cavities shown in the Figure were replicated using 45 nm boehmite powder (scale bar represents 10 μm).