Journal of Physics D Applied Physics · 1978 · 36 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ChemistryThin FilmsCoating TechnologyCoatingsDopingOxide SemiconductorsSurface CoatingsThin Film Electrical PropertiesCarrier ConcentrationConductionCrystallinityCrystallinity AnalysisDoping Effects On Electrical PropertiesDoping In Thin FilmsTin-doped Indium OxideX-ray Diffraction Analysis
The effects of adding up to 50 mole.% of tin to pyrolytic In2O3 selective coatings were investigated. Up to 10% doping the resistivity is found to decrease with the corresponding increase of carrier concentration. Further additions increase the resistivity and decrease the carrier concentration. X-ray diffraction and electron microscope observations indicated that (400) is the strongest peak. The tin additions cause the lattice parameter to decrease indicating that the decrease in resistivity is caused due to the replacement of In3+ ions by Sn4+ ions. The increase of resistivity at higher tin additions is due to poor crystallinity. The films with low resistivities had very low activation energies for electrical conduction.
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Optical and electrical properties of doped In2O3 films
H. Köstlin, R. Jost, W. Lems · physica status solidi (a) · 1975 · 289 citations