Scanning magnetoresistance microscopy with a magnetoresistive sensor cantilever

Abstract

In this work, a cantilever with a magnetoresistive (MR) sensor is fabricated for scanning magnetoresistance microscope, in order to realize the simultaneous imaging of surface topography and stray magnetic field distribution. A constant current flowing through a meander-patterned metal wire produces a defined magnetic field, and the wire is used as a sample to demonstrate the simultaneous imaging and to reveal the field sensitivity of the cantilever. A MR image has been successfully obtained with lateral spatial resolution of a few μm and a field sensitivity (Hmin≈1.7 Oe) at room temperature.