Ion-stimulated sorption: An ion-assisted technology with new possibilities

Ion-beam-assisted deposition of thin films

Peter Martin, H. A. Macleod, R. P. Netterfield et al. · Applied Optics · 1983 · 281 citations

Modification of the optical and structural properties of dielectric ZrO2 films by ion-assisted deposition

Philip Martin, R. P. Netterfield, W. G. Sainty · Journal of Applied Physics · 1984 · 241 citations

Optical Materials, Engineering, Thin Film Process Technology +19

Fundamentals of Ion Plating

D.M. Mattox · Journal of Vacuum Science and Technology · 1973 · 199 citations

Engineering, Chemical Deposition, Ion Process +19

Activated Reactive Evaporation Process for High Rate Deposition of Compounds

R.F. Bunshah, AC Raghuram · Journal of Vacuum Science and Technology · 1972 · 194 citations

Materials Science, High Rate Deposition, Chemical Engineering +13

Ionized-cluster beam deposition

Toshiyuki Takagi, Ichiro Yamada, Akio Sasaki · Journal of Vacuum Science and Technology · 1975 · 112 citations

Engineering, Fine Nozzle, Vacuum Device +18