Applied Physics Letters · 1995 · 169 citations · 0 references
Natural SciencesMaterials SciencePhysicsElectronic MaterialsNanomaterialsNanotechnologyElectron Beam LithographyMetal-semiconductor ContactsNanoelectronicsNanostructured Electronic MaterialsSemiconductor NanomaterialsCoulomb BlockadeCoulomb Blockade TunnelingCurrent-voltage RelationsNanoelectronic Device PhysicsNanofabrication Of Nanoelectronic DevicesNanostructuresPotential - Current CharacteristicsTunneling In Nanostructures
Clear Coulomb blockade effects have been observed in lateral metal nanostructures fabricated by combined electron beam lithography and ionized beam deposition. Islands between 2 and 3 nm in diameter were formed in a 25 nm gap for which the effective tunneling capacitance is calculated to be 0.2 aF. Clear Coulomb gaps and staircases were observed at 77 K in current–voltage characteristics. The staircases can still be seen at room temperature but the gaps tend to a nonlinearity in I–V characteristics around zero bias voltage. The total device area is about 0.01 μm2.