Micro-tribo-mechanical properties of nanocrystalline TiN thin films for small scale device applications - Concepedia

Concepedia

Publication | Closed Access

Micro-tribo-mechanical properties of nanocrystalline TiN thin films for small scale device applications

36

Citations

30

References

2015

Year

D. Dinesh Kumar, N. Kumar, S. Kalaiselvam, S. Dash, R. Jayavel

Tribology International

Materials ScienceEngineeringMicro-tribo-mechanical PropertiesNanomaterialsNanotechnologyMechanical EngineeringApplied PhysicsNanometrologyThin FilmsNanoscale ScienceNanocrystalline MaterialThin Film Processing

References

	Year	Citations

Page 1