Concepedia

Characterization of aluminium nitride thin films

Yoshihisa Watanabe, Yoshikazu Nakamura, Shigekazu Hirayama, Yuusaku Naota

Ceramics International · 1996 · 11 citations · 7 references

DOI

Concepts

References

7

Atomic Force Microscope

G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text

, , +14

Surface Studies by Scanning Tunneling Microscopy

G. Binnig, H. Rohrer, Ch. Gerber et al. · Physical Review Letters · 1982 · 4.6K citations · Full text

, , +14

VACUUM DEPOSITION OF AlN ACOUSTIC TRANSDUCERS

M.T. Wauk, D.K. Winslow · Applied Physics Letters · 1968 · 76 citations

, , +14

GHz-Band Surface Acoustic Wave Devices Using Aluminum Nitride Thin Films Deposited by Electron Cyclotron Resonance Dual Ion-Beam Sputtering

Hiroshi Okano, Naoki Tanaka, Kenichi Shibata Kenichi Shibata et al. · Japanese Journal of Applied Physics · 1993 · 27 citations

, , +16

Low-Temperature Synthesis of Aluminium Nitride Film by HCD-Type Ion Plating

Matsuo Kishi, Mizuaki Suzuki Mizuaki Suzuki, Kenichi Ogawa · Japanese Journal of Applied Physics · 1992 · 23 citations

, , +16