Applied Physics Letters · 1992 · 48 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthOxide SemiconductorsSemiconductor Device MaterialsSuperconducting Thin FilmsDevice FabricationEpitaxial Film GrowthEpitaxial MaterialsEpitaxial Thin-film GrowthGrain BoundariesJosephson JunctionsOrientation ControlSubstrate Orientation Effects
A low-temperature argon ion milling process has been used to induce growth of c-oriented YBa2Cu3O7 on (001) MgO substrates with the in-plane film axes rotated 45° with respect to those of the substrate, and with respect to those of films grown on untreated regions of the substrate. This process is compatible with standard photolithographic processing, and has been used to produce defined areas of the two orientations on the same substrate. Josephson junctions and dc SQUIDs have been fabricated using the resulting grain boundaries.
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Bi-epitaxial grain boundary junctions in YBa2Cu3O7
K. Char, M. S. Colclough, S. M. Garrison et al. · Applied Physics Letters · 1991 · 293 citations
Substrate step-edge YBa2Cu3O7 rf SQUIDs
K.P. Daly, W. D. Dozier, J.F. Burch et al. · Applied Physics Letters · 1991 · 133 citations