Concepedia

Aerosol formation by rapid nucleation during the preparation of SiO2 thin films from SiCl4 and O2 gases by CVD process

Kikuo Okuyama, David D. Huang, John H. Seinfeld, Naoyuki Tani, Yasuo Kousaka

Chemical Engineering Science · 1991 · 23 citations · 16 references

DOI

Concepts

References

16

The mean free path in air

S. G. Jennings · Journal of Aerosol Science · 1988 · 393 citations

, , +8

Deposition of GaAs Epitaxial Layers by Organometallic CVD: Temperature and Orientation Dependence

D.H. Reep, S. K. Ghandhi · Journal of The Electrochemical Society · 1983 · 294 citations

, , +17

A discrete-sectional solution to the aerosol dynamic equation

Jin Wu, Richard C. Flagan · Journal of Colloid and Interface Science · 1988 · 142 citations

, , +12

Gas phase depletion and flow dynamics in horizontal MOCVD reactors

J. van de Ven, G.M.J. Rutten, M.J. Raaijmakers et al. · Journal of Crystal Growth · 1986 · 141 citations

, , +16

Modeling and Analysis of Low Pressure CVD Reactors

Klavs F. Jensen, David B. Graves · Journal of The Electrochemical Society · 1983 · 134 citations

, , +17