Etching of Surfaces with 8-Kev Argon Ions

Abstract

Methods of optical and electron microscopy were used to study the effects on solid surfaces of bombardment with argon ions of 8-kev energy. The targets were crystals of aluminum, zinc and α-corundum, and polycrystalline gold and aluminum. At oblique ionic incidence, etch hillocks were formed that were invariably oriented along the surface component of the direction of the ionic beam. Crystals were etched by ionic bombardment while being heated at elevated temperatures; this technique revealed dislocations widely spaced along the direction of growth in aluminum crystals.