Concepedia

Mechanisms and theory of physical sputtering by particle impact

Peter Sigmund

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 292 citations · 237 references

DOI

Concepts

References

237

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

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Computer simulation of atomic-displacement cascades in solids in the binary-collision approximation

Mark T. Robinson, Ian M. Torrens · Physical review. B, Solid state · 1974 · 1.6K citations

, , +17

Energy Dissipation by Ions in the kev Region

J. Lindhard, M. Scharff · Physical Review · 1961 · 1.4K citations

, , +12

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

, , +15

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 916 citations

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