Concepedia

Nanocomposite metal/plasma polymer films prepared by means of gas aggregation cluster source

Oleksandr Polonskyi, Pavel Solař, Ondřej Kylián, Martin Drábik, Anna Artemenko, Jaroslav Kousal, Jan Hanuš, Josef Pešička, Eva Kolíbalová, D. Slavı́nská,

Thin Solid Films · 2011 · 69 citations · 19 references

DOI

Concepts

References

19

Thin films from energetic cluster impact: A feasibility study

Hellmut Haberland, Martin Karrais, Martin Mall et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 533 citations

, , +13

Nanoclusters deposited on surfaces

C. Binns · Surface Science Reports · 2001 · 439 citations

, , +10

Cluster beam deposition: a tool for nanoscale science and technology

Karsten Wegner, P. Piseri, H. Vahedi Tafreshi et al. · Journal of Physics D Applied Physics · 2006 · 425 citations

, , +10

Filling of micron-sized contact holes with copper by energetic cluster impact

Hellmut Haberland, Martin Mall, Michael Moseler et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 389 citations

, , +7

Generation of Metal Clusters Containing from 2 to 500 Atoms

K. Sattler, J. Mühlbach, E. Recknagel · Physical Review Letters · 1980 · 369 citations

, , +8