Nanocomposite metal/plasma polymer films prepared by means of gas aggregation cluster source

Thin films from energetic cluster impact: A feasibility study

Hellmut Haberland, Martin Karrais, Martin Mall et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 531 citations

Materials Science, Cluster Science, Excellent Thin Films +12

Nanoclusters deposited on surfaces

C. Binns · Surface Science Reports · 2001 · 434 citations

Materials Science, Engineering, Nanocluster +4

Cluster beam deposition: a tool for nanoscale science and technology

Karsten Wegner, P. Piseri, H. Vahedi Tafreshi et al. · Journal of Physics D Applied Physics · 2006 · 422 citations

Cluster Sources, Engineering, Nanocluster +18

Filling of micron-sized contact holes with copper by energetic cluster impact

Hellmut Haberland, Martin Mall, Michael Moseler et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 389 citations

Engineering, Mechanical Engineering, Kinetic Energy +18

Generation of Metal Clusters Containing from 2 to 500 Atoms

K. Sattler, J. Mühlbach, E. Recknagel · Physical Review Letters · 1980 · 369 citations

Engineering, Nuclear Physics, Nanocluster +19