Ion etching of thin W layers: enhanced reflectivity of W-C multilayer coatings - Concepedia

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Ion etching of thin W layers: enhanced reflectivity of W-C multilayer coatings

29

Citations

8

References

1991

Year

E. J. Puik, M.J. van der Wiel, H. Zeijlemaker, J. Verhoeven

Applied Surface Science

Materials ScienceIon EtchingEngineeringW-c Multilayer CoatingsSurface ScienceApplied PhysicsMulti-functional CoatingPlasma EtchingThin W LayersDepth-graded Multilayer CoatingSurface Processing

References

	Year	Citations

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