Publication | Closed Access
Electromigration and diffusion in thin films: A new technique
14
Citations
6
References
1978
Year
EngineeringThin Film Process TechnologyCharge TransportDiffusion CoefficientTransport PhenomenaElectric FieldElectronic PackagingCharge Carrier TransportMetal MigrationElectrical EngineeringElectromigration TechniquePhysicsMicroelectronicsElectrical PropertyDiffusion ResistanceApplied PhysicsThin FilmsElectrical InsulationElectrical Mobility
A new technique has been realized for studying metal migration induced by an electric field in thin metallic stripes. The same experiment allows one to determine the diffusion coefficient, the drift mobility, and the effective charge in the same conditions. A sectioning technique and radiotracers are used. Due to the high sensitivity, the data can be obtained down to the temperatures which are of practical interest for the electronic components.
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