Thermal properties of suspended porous silicon micro-hotplates for sensor applications

Micromachined metal oxide gas sensors: opportunities to improve sensor performance

Isolde Simon, Nicolae Bârsan, Michael Bauer et al. · Sensors and Actuators B Chemical · 2001 · 643 citations

Materials Science, Chemical Engineering, Engineering +11

Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation

Grigoris Kaltsas, A. G. Nassiopoulou · Sensors and Actuators A Physical · 1999 · 123 citations

Electrical Engineering, Engineering, Gas Sensor +6

Thermal isolation in microsystems with porous silicon

Vladimir Lysenko, S. Périchon, B. Remaki et al. · Sensors and Actuators A Physical · 2002 · 100 citations

Materials Science, Engineering, Microfabrication +8

Porous Silicon as an Effective Material for Thermal Isolation on Bulk Crystalline Silicon

A. G. Nassiopoulou, Grigoris Kaltsas · physica status solidi (a) · 2000 · 71 citations

Materials Science, Bulk Crystalline Silicon, Engineering +9

Fabrication of suspended porous silicon micro-hotplates for thermal sensor applications

C. Tsamis, A. Tserepi, A. G. Nassiopoulou · physica status solidi (a) · 2003 · 20 citations

Engineering, Mechanical Engineering, Silicon On Insulator +17