Surface and Coatings Technology · 2001 · 36 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceAnalytical ChemistryMaterials CharacterizationThin FilmsIonization TechniquesMass SpectrometryMaterial FilmWear-resistant MaterialsSecondary Ion Mass SpectrometryTime-of-flight Mass SpectrometryTime-of-flight Secondary Ion Mass SpectrometryTime-of-flight SpectroscopyWear Mechanisms
16
Handbook of thin film process technology
W Steckelmacher · Vacuum · 1996 · 285 citations
Natural Sciences, Chemical Engineering, Materials Science +12