Process control of plasma polymerization in a large industrial reactor

Measurement of electron energy distribution in low-pressure RF discharges

Valery Godyak, R. B. Piejak, B. M. Alexandrovich · Plasma Sources Science and Technology · 1992 · 750 citations

Electrical Engineering, Eedf Measurements, Engineering +10

Instantaneous Direct-Display System of Plasma Parameters by Means of Triple Probe

Sin-Li Chen, Tadashi Sekiguchi · Journal of Applied Physics · 1965 · 526 citations · Full text

Engineering, Measurement, Plasma Science +23

The Collection of Positive Ions by a Probe Immersed in a Plasma

J. E. Allen, Robert L. Boyd, P. Reynolds · Proceedings of the Physical Society Section B · 1957 · 387 citations

Spherical Probe, Electrical Engineering, Engineering +13

Plasma aminofunctionalisation of PVDF microfiltration membranes: comparison of the in plasma modifications with a grafting method using ESCA and an amino-selective fluorescent probe

Michaela Müller, Christian Oehr · Surface and Coatings Technology · 1999 · 84 citations

Membrane Technology, Biochemistry, Membrane Process +7

Langmuir probe measurements in commercial plasma plants

A. Brockhaus, C Borchardt, J. Engemann · Plasma Sources Science and Technology · 1994 · 68 citations

Plasma Plant, Engineering, Analytical Instrumentation +13