Surface and Coatings Technology · 2000 · 43 citations · 16 references
Materials ScienceMaterials EngineeringHigh Rate DepositionEngineeringPhysicsMicrofabricationSurface ScienceApplied PhysicsMagnetron SputteringThin FilmsPulsed Laser DepositionMicroelectronicsChemical DepositionChemical Vapor DepositionThin Film ProcessingCrnx Films
16
C. Gautier, Hamza Moussaoui, F. Elstner et al. · Surface and Coatings Technology · 1996 · 80 citations
Materials Engineering, Materials Science, Vacuum Arc Evaporation +11