Cathodic corrosion of polycrystalline silicon MEMS

Atlas of electrochemical equilibria in aqueous solutions

Roger Parsons · Journal of Electroanalytical Chemistry · 1967 · 2.7K citations

Chemical Engineering, Engineering, Fundamental Electrochemistry +5

Principles and prevention of corrosion

Robert S. Walker · Materials & Design (1980-2015) · 1993 · 2.4K citations

Materials Science, Corrosion Technology, Corrosion Protection +4

The role of van der Waals forces in adhesion of micromachined surfaces

Frank W. DelRio‬, Maarten P. Boer, J. A. Knapp et al. · Nature Materials · 2005 · 516 citations

Materials Science, Engineering, Micromachines +10

Adhesion-related failure mechanisms in micromechanical devices

Carlos H. Mastrangelo · Tribology Letters · 1997 · 186 citations

Wafer level anti-stiction coatings for MEMS

W. Robert Ashurst, Carlo Carraro, Roya Maboudian et al. · Sensors and Actuators A Physical · 2003 · 105 citations

Materials Science, Wafer Scale Processing, Engineering +6