Wet chemical etching of Si(100) surfaces in concentrated NH4F solution: formation of (2 × 1)H reconstructed Si(100) terraces versus (111) facetting

U. Neuwald, Harald Hessel, A. Feltz, U. Memmert, R. Jürgen Behm

Surface Science · 1993 · 66 citations · 20 references

Concepts

References

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