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Wet chemical etching of Si(100) surfaces in concentrated NH4F solution: formation of (2 × 1)H reconstructed Si(100) terraces versus (111) facetting

Materials ScienceSurface CharacterizationChemical EngineeringEngineeringSurface AnalysisSurface ScienceApplied PhysicsSurface EngineeringSilicon On InsulatorTerraces VersusPlasma EtchingWet Chemical EtchingConcentrated Nh4f Solution