Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Abstract

The discharge behavior in atmospheric pressure dielectric barrier discharge using ZnO-coated dielectric layer is examined. ZnO thin film on alumina using rf magnetron sputter causes about a factor of a million higher surface conductivity than bare alumina surface. Experimental result shows that discharge uniformity is improved definitely in the case of ZnO-coated dielectric barrier discharge. Increase of surface conductivity stimulates charges to spread over the dielectric surface widely. These charge spreading enhances the uniformity and the stability of atmospheric pressure discharge in open air by initiation of consecutive streamers.