Concepedia

Publication | Closed Access

Electrical characteristics due to differences in crystal damage induced by various implant conditions

DOI

13

Citations

1

References

2005

Year

G. Fuse, Masatoshi SANO, Hiroki Murooka, T. Yagita, M. Kabasawa, T. Siraishi, Y. Fujino, Noriyuki Suetsugu, Hiroyuki Kariya, H. Izutani,
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1