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Electrical characteristics due to differences in crystal damage induced by various implant conditions

G. Fuse, Masatoshi SANO, Hiroki Murooka, T. Yagita, M. Kabasawa, T. Siraishi, Y. Fujino, Noriyuki Suetsugu, Hiroyuki Kariya, H. Izutani,

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 13 citations · 1 references