An Examination of the Product Catalyzed Reaction of Trimethylgallium with Phosphine and the Mechanism of the Chemical Vapor Deposition of Gallium Phosphide and Gallium Arsenide

Abstract

The formation of via reaction of with was examined. The reaction follows a Langmuir‐Hinshelwood mechanism (adsorption of both reagents prior to reaction). The surface was also found to catalyze the unimolecular decomposition of and . These results and similar ones for the reaction of with are discussed.