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Design and fabrication of MEMS thermoelectric generators with high temperature efficiency

Electrical EngineeringEnergy HarvestingEngineeringMicrofabricationEnergy ConversionHigh Temperature EfficiencyMems Thermoelectric GeneratorsApplied PhysicsThermoelectricsThermoelectric MaterialThermodynamicsHeat TransferMicroelectronicsThermal EngineeringMicro-electromechanical SystemPyroelectricity