On the plasma chemistry of the C/H system relevant to diamond deposition processes - Concepedia

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On the plasma chemistry of the C/H system relevant to diamond deposition processes

23

Citations

11

References

1996

Year

C. G. Schwärzler, O. Schnabl, J. Laimer, H. Störi

Plasma Chemistry and Plasma Processing

Diamond-like CarbonEngineeringDeposition ProcessesNonthermal PlasmaApplied PhysicsC/h System RelevantPhysical ChemistryHydrogenChemistryGas Discharge PlasmaPlasma Processing

References

	Year	Citations

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