Concepedia

Electron irradiation of ion-implanted n-type Si-SiO 2 structures studied by deep-level transient spectroscopy

S. Kaschieva, K.G. Stefanov, D.S. Karpuzov

Applied Physics A · 1998 · 11 citations · 0 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsIon ImplantationRadiation Damage In MaterialsSemiconductor DefectsSemiconductor Device MaterialsSemiconductor PhysicsSilicon MaterialsDefect Evolution Under IrradiationElectron Beam Irradiation EffectsIon Implantation EffectsIrradiation DamageSilicon Device MaterialsSilicon DioxideSilicon Physics