Wood Science and Technology · 2014 · 13 citations · 14 references
EngineeringManufacturing EngineeringManufacturing ProcessesMaterials ProcessingSemiconductor DevicesDevice ModelingDevice SimulationIntegrated Circuit FabricationManufacturing SimulationMicrofabrication ProcessesProcess SimulationFabrication Process SimulationSilicon Wafer ProcessingSlab BuildingThermo-mechanical Stress
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