IEEJ Transactions on Electrical and Electronic Engineering · 2013 · 18 citations · 3 references
Natural SciencesElectrical EngineeringMaterials ScienceElectrochemical EngineeringElectrochemistrySurface ScienceElectrochemical CellsElectrochemical KineticsElectrode MaterialsElectrode PotentialsSurface ChargeWorking ElectrodesElectrode DesignElectrode Design OptimizationRetinal ProsthesesSputteringSputtering ProcessesSputtering TechniquesThin-film ElectrodesVoltammetry
Abstract We have optimized the sputtering conditions for sputtered IrOx and TiN electrodes for retinal prosthesis. The basic electrochemical characteristics were evaluated by cyclic voltammetry, and the surface morphology was inspected by atomic force microscopy. To measure the charge delivery capacity (CDC), a 300‐µm diameter electrode was formed, a balanced biphasic current pulse was applied, and the voltage response was measured. From the experimental results, the CDCs of IrOx and TiN in the best sputtering conditions were improved by more than 8 and 4 times compared to that of Pt, respectively. © 2013 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.
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